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    Products > High, Ultra High Vacuum Equipment > Mu metal Chamber / TiN Coating

Mu-metal Chambers ( High Permeability Material )

  • PDFを表示 Magnetic isolated Chambers are suitable for analyzer use
  • Managed with consistent way of material anneal, welding,
    hydrogen anneal and magnetic anneal
  • Implement various inspection (magnetic field measurement, He leak test )
  • Shipment after MS(mass spectrometry) and baking is also available

 

ミューメタルチャンバ(高透磁率材料)

 

Mu-metal Chamber Product Examples



  • Flux measurement by fluxmeter

 

TiN Coating ( inner side )

  • PDFを表示 Apply to EHV (extreme high vacuum), UHV (ultra high vacuum) chambers
  • Reduction of evacuation time
  • Reduction of outgas in chambers
  • Effective suppression of secondary electron emission
  • Low price ・ Quick delivery

TiNコーティング(チャンバ内面処理)

 

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