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    Products > High, Ultra High Vacuum Equipment > Vacuum Chambers

Vacuum Chambers

PDFを表示 Manufacture capable with SUS, Aluminum and Mu-metal
Available Blanket Order from Design to Manufacture


  • Enable to Manufacture UHV chamber by Special forging
  • Various Manufacture Materials;
    ・SUS304 ・SUS316L ・310 ・SS ・Aluminum ・Mu-metal
    ・Pyrex ・Quartz ・Acryl ・Polyvinyl chloride
    ( Please contact us for other materials )
  • Provide Chamber of small to large size ( up to □2000、φ2000 )
  • Available Blanket Order from Design to Manufacture and Leak Test
  • Various Chamber Manufacturing;
    UHV, HV, LV, Humidity control, Gas Atmosphere, etc.
  • Correspond to kinds of coating ( TiN, Teflon )
  • Baking Unit Manufacture is also available
  • Enable shipment after QMS measurement and Baking, if required

Spherical Vacuum Chamber
( Φ260 )

  Φ260 球型真空チャンバ

Square Vacuum Chamber ( 500×1000 mm )

  500×1000 角型真空チャンバ




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