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    Products > Precision Positioning Stages > Non-magnetic Actuator, Vacuum Stages 

Non-magnetic Actuator applying to vacuum

Ambience

Magnetic Proofing, Radiation Proofing, Apply to UHV

Resolution

High resolution of 30 nm

Torque

Large torque of 2.2 kgf

Compact Design

Compact body
真空対応非磁性アクチュエータ
  11 axes stage ( in UHV chamber )

 

 

Vacuum Stages

  • Available to use in UHV
  • Manual, Piezo, or Stepping Motor Stage is selectable
  • High Resolution of 10 nm minimum


Available various stages combination

様々なステージの組合せが可能 矢印真空用位置決めステージ

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