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    Products > Precision Positioning Stages > Non-magnetic Actuator, Vacuum Stages 

Non-magnetic Actuator applying to vacuum


Magnetic Proofing, Radiation Proofing, Apply to UHV


High resolution of 30 nm


Large torque of 2.2 kgf

Compact Design

Compact body
  11 axes stage ( in UHV chamber )



Vacuum Stages

  • Available to use in UHV
  • Manual, Piezo, or Stepping Motor Stage is selectable
  • High Resolution of 10 nm minimum

Available various stages combination

様々なステージの組合せが可能 矢印真空用位置決めステージ

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