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Cat-CVD Equipment     CAT-100
Catalytic Chemical Vapor Deposition Equipment

PDFを表示 Cat-CVD equipment for
Basic experiment of mass production of solar cell


  • Provides kinds of thin film deposition utilizing Catalytic Chemical Vaper Deposition
  • A uniform and highly-dense film deposition in a low temperature


  • Amorphous silicon thin film deposition
  • Silicon nitride passivation film deposition
  • Cat-doping:phosphorus (P) and boron (B)
  • PTFE repellent film deposition


CAT CVD equipment


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