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    Products >Physical/Chemical, Semiconductor Manufacturing Equipment  > Gas Analysis Equipment for Blowhole in Glass

Gas Analysis Equipment for Blowhole in Glass

PDFを表示 Composition Analysis for Ultratrace Gas of Blowhole in Glass
Suitable for various Material Evaluation


  • Measurement/Analysis of gases emitted from the blowhole in glass
  • Using Quadrupole Mass Spectrometer ( QMS ) technology
  • Available Quantitative and Qualitative Analysis down to minimum 5 picoliter
  • Glass sample size : approximately 10mm x 10mm
  • Advantages of specimen exchange/maintenance by Load Lock structure


  • Cause investigation of gas generation
  • Evaluation of Manufacturing Process
  • Evaluation of Quality Stability by quantifying gas volume
  • Specify degassing condition



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