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    Products >Physical/Chemical, Semiconductor Manufacturing Equipment  > Magnetic Shielded Sputter Gun

Magnetic Shielded Sputter Gun

PDFを表示 Magnetic Shields enable the RHEED measurement
in the same chamber
Small sized, Low cost, Attachable to the current chamber

特徴

  • スパッタガン Applicable to various targets such as metal, insulator, magnetic material, or non-magnetic material
  • VIC’s Film Deposition Chamber which installs Magnetic Shielded Sputter Gun enables you to measure the RHEED patterns in the same chamber
  • The flange mount structure enables you to attach to your current chamber, then provides you kinds of experiment for film deposition
  • Erosion adjustment is carried out easily by adjusting position or exchanging for internal magnet

 

 

Application

・Film Coating
・Semiconductor Device
・Superconductor Film
・MEMS

 

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