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    Products > Beam line Related > Coherent Diffusion Chamber

Chamber for Coherent Diffusion Spectrum

  • Inclining operation available while maintaining UHV condition
  • No deterioration of vacuum while rotating
  • High resolution and no backrush
  • Available isolation of vibration from external pump, etc.
    by implemented vibration damping mechanism


Whole Equipment



Motor and rotation axis



Vibration Damping Mechanism


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